Soft MEMS

Development of a fully soft sensor

WHAT IS our technology

Stretchable soft membranes that can be integrated on MEMS structure to realize:

• Platform for direct measurement of movements and forces of individual cells
• Platform to measure Young’s modulus of a confluent cell layer
• Strain gauge integrated in soft membrane
• Si sensors/electronics integrated into soft membranes
• Actuator based on SI or LTCC (Low Temperature Co-fired Ceramics) technologies with PDMS (Polydimethylsiloxane) micro valves.

APPLICATIONS

• Strechable membranes for study of cell’s mechanics
• Monitoring of cell traction
• Measurement tool at CellStrates (http://cellstrates.com/)
• Interactive refreshable graphical display for tactile applications (Braille like display)
• Artificial skin with flexible metal interconnections and strain gauge for miniature tactility sensors and haptic applications

What’s new?

• Implanted strain sensor into stretchable membrane
• Hermetic sealing between soft and hard material

WHAT’s NEXT

A fully integrated components with sensors, actuators based on stretchable soft membrane to develop a glove with articicial sensitive skin.

INTERNATIONAL RECOGNITION:

Sorba, F. and Martin-Olmos, C., 2018. High resolution polymer coated strain sensors for in-liquid operation. Microelectronic Engineering, 191, pp.38-41.

FOR MORE INFORMATION

Contact: Guy Voirin, guy.voirin@csem.ch
Contact: Cristina Martin-Olmos, cristina.martinolmos@csem.ch