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Information

Partner: CSEM, Switzerland
Advanced technology: Soft MEMS
Contact: Guy Voirin
Email: guy.voirin@csem.ch
Phone: +41 032 720 5152

Soft MEMS

Development of a fully soft sensor

WHAT IS our technology

Stretchable soft membranes that can be integrated on MEMS structure to realize:

  • Platform for direct measurement of movements and forces of individual cells
  • Platform to measure Young’s modulus of a confluent cell layer
  • Strain gauge integrated in soft membrane
  • Si sensors/electronics integrated into soft membranes
  • Actuator based on SI or LTCC (Low Temperature Co-fired Ceramics) technologies with PDMS (Polydimethylsiloxane) micro valves.

CellStrates Project

APPLICATIONS

  • Strechable membranes for study of cell’s mechanics
  • Monitoring of cell traction
  • Measurement tool at CellStrates (http://cellstrates.com/)
  • Interactive refreshable graphical display for tactile applications (Braille like display)
  • Artificial skin with flexible metal interconnections and strain gauge for miniature tactility sensors and haptic applications

Braille like display project

What’s new?

  • Implanted strain sensor into stretchable membrane
  • Hermetic sealing between soft and hard material

WHAT’s NEXT

A fully integrated components with sensors, actuators based on stretchable soft membrane to develop a glove with articicial sensitive skin.

INTERNATIONAL RECOGNITION:

Sorba, F. and Martin-Olmos, C., 2018. High resolution polymer coated strain sensors for in-liquid operation. Microelectronic Engineering, 191, pp.38-41.

FOR MORE INFORMATION

Contact: Guy Voirin, guy.voirin@csem.ch
Contact: Cristina Martin-Olmos, cristina.martinolmos@csem.ch